Development of a bearing-free, low-vibration vacuum chuck for a spin-coating apparatus

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E. Gómez Méndez
C. M. Posada
J. M. Jaramillo Ocampo

 

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How to Cite
Méndez, E., Posada, C. M., & Ocampo, J. M. (2020). Development of a bearing-free, low-vibration vacuum chuck for a spin-coating apparatus. Journal of Applied Research and Technology, 18(1). https://doi.org/10.22201/icat.24486736e.2020.18.1.928
Author Biographies

E. Gómez Méndez

Universidad EAFIT. Department of Physical Sciences. Medellín, Colombia

C. M. Posada

Universidad EAFIT. Department of Physical Sciences. Medellín, Colombia.

J. M. Jaramillo Ocampo

Universidad EAFIT. Department of Physical Sciences. Medellín, Colombia.