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In this work, the fabrication and characterization of fully solution-processed zinc oxide metal–insulator–semiconductor (MIS) capacitors by ultrasonic spray pyrolysis (USP) are presented. Fluorine tin oxide by USP was used as transparent electrode, while spin-on glass by spin-coating
was used as dielectric and zinc oxide by USP was used as active layer. Also, the zinc oxide film was characterized using photoluminescence spectroscopy, X-ray diffraction and Fourier transform infrared spectroscopy. The MIS capacitors were fabricated over glass slides and were highly transparent in the visible range, which makes their use feasible in transparent electronics. Employing capacitance–voltage and current–voltage measurements, the MIS capacitors were characterized.
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