A Simple Substrate Heater Device With Temperature Controller for Thin Film Preparation

Abstract

A simple substrate heater and its temperature controller were designed and built in order to prepare thin films in a high

vacuum deposition system. The substrate heater was elaborated with a glass-ceramic body and a molybdenum foil

heater. The applied power and the temperature are regulated by a power controller board using a microcontroller

programmed with a proportional-integrative-derivative algorithm. The heater/controller system was tested in a high

vacuum deposition system and the results of its characterization at 100, 200, 300 and 400 °C are presented. A

variation in temperature better than ± 0.5 °C was obtained for all the tested temperatures. An application of the

substrate heater is demonstrated by evaporating gold thin films on heated glass substrates.