Design of Plasma Generator Driven by High-frequency High-voltage Power Supply

Abstract

In this research, a high-frequency high-voltage power supply designed for plasma generator is presented. The powersupply mainly consists of a series resonant converter with a high-frequency high-voltage boost transformer. Due to theindispensable high-voltage inheritance in the operation of plasma generator, the analysis of transformer needconsidering not only winding resistance, leakage inductance, magnetizing inductance, and core-loss resistance, butalso parasitic capacitance resulted from the insulation wrappings on the high-voltage side. This research exhibits asimple approach to measuring equivalent circuit parameters of the high-frequency, high-voltage transformer with straycapacitance being introduced into the conventional modeling. The proposed modeling scheme provides not only aprecise measurement procedure but also effective design information for series-load resonant converter. The plasmadischarging plate is designed as part of the electric circuit in the series load-resonant converter and the circuit modelof the plasma discharging plate is also conducted as well. Thus, the overall model of the high-voltage plasmagenerator is built and the designing procedures for appropriate selections of the corresponding resonant-circuitparameters can be established. Finally, a high-voltage plasma generator with 220V, 60Hz, and 1kW input, along witha 22 kHz and over 8kV output, is realized and implemented.