MÉNDEZ, E. G.; POSADA, C. M.; OCAMPO, J. M. J. Development of a bearing-free, low-vibration vacuum chuck for a spin-coating apparatus. Journal of Applied Research and Technology, [S. l.], v. 18, n. 1, 2020. DOI: 10.22201/icat.24486736e.2020.18.1.928. Disponível em: https://jart.icat.unam.mx/index.php/jart/article/view/928. Acesso em: 18 apr. 2024.