Development of a bearing-free, low-vibration vacuum chuck for a spin-coating apparatus

Article Sidebar

PDF
Published: Mar 20, 2020
DOI: https://doi.org/10.22201/icat.24486736e.2020.18.1.928
Keywords:
Spin coater, vacuum chuck, thin films, photoresist, mechanical design

Main Article Content

E. Gómez Méndez
C. M. Posada
J. M. Jaramillo Ocampo

Article Details

How to Cite
Méndez, E. G., Posada, C. M., & Ocampo, J. M. J. (2020). Development of a bearing-free, low-vibration vacuum chuck for a spin-coating apparatus. Journal of Applied Research and Technology, 18(1). https://doi.org/10.22201/icat.24486736e.2020.18.1.928
Issue
Vol. 18 No. 1 (2020)
Section
Articles
Author Biographies

E. Gómez Méndez

Universidad EAFIT. Department of Physical Sciences. Medellín, Colombia

C. M. Posada

Universidad EAFIT. Department of Physical Sciences. Medellín, Colombia.

J. M. Jaramillo Ocampo

Universidad EAFIT. Department of Physical Sciences. Medellín, Colombia.